Patent Assignment
Reel/Frame 022598/0583
Assignment of Assignor's Interest
Recorded: 2009-04-27
Pages: 2
Assignor
SHIMADA, MASAKAZU
Executed: 2009-04-20
Assignee
HITACHI KOKUSAI ELECTRIC, INC.
14-1 SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Heating Device, and Semiconductor Device Manufacturing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.