Patent Assignment
Reel/Frame 022599/0876
Assignment of Assignor's Interest
Recorded: 2009-04-27
Pages: 3
Assignors
OHSAWA, YOUICHI
Executed: 2009-03-30
HATAKEYAMA, JUN
Executed: 2009-03-30
TACHIBANA, SEIICHIRO
Executed: 2009-03-30
KINSHO, TAKESHI
Executed: 2009-03-30
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Sulfonium Salt-Containing Polymer, Resist Composition, and Patterning Process