Patent Assignment
Reel/Frame 022612/0981
Assignment of Assignor's Interest
Recorded: 2009-04-29
Pages: 4
Assignors
FELDMANN, HEIKO
Executed: 2009-04-22
GRUNER, TORALF
Executed: 2009-04-14
EPPLE, ALEXANDER
Executed: 2009-04-14
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method of Manufacturing a Projection Objective and Projection Objective
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.