Patent Assignment
Reel/Frame 022633/0071
Assignment of Assignor's Interest
Recorded: 2009-05-04
Pages: 3
Assignors
OHASHI, MASAKI
Executed: 2009-04-06
OHSAWA, YOUICHI
Executed: 2009-04-06
KINSHO, TAKESHI
Executed: 2009-04-06
WATANABE, TAKERU
Executed: 2009-04-06
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Novel Photoacid Generator, Resist Composition, and Patterning Process