Patent Assignment
Reel/Frame 022638/0439
Assignment of Assignor's Interest
Recorded: 2009-05-05
Pages: 3
Assignors
NISHIURA, TOMOFUMI
Executed: 2008-12-24
MIYAMOTO, ATSUSHI
Executed: 2008-12-24
SHISHIDO, CHIE
Executed: 2008-12-25
SUTANI, TAKUMICHI
Executed: 2009-01-07
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHINBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Method and Apparatus for Inspecting Defect of Pattern Formed on Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.