Patent Assignment
Reel/Frame 022648/0615
Assignment of Assignor's Interest
Recorded: 2009-05-06
Pages: 8
Assignors
BENVEGNU, DOMINIC J.
Executed: 2009-04-22
SWEDEK, BOGUSLAW A.
Executed: 2009-04-22
KO, SEN-HOU
Executed: 2009-04-22
RAVID, ABRAHAM
Executed: 2009-04-21
MILLER, PAUL V.
Executed: 2009-04-24
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, LEGAL AFFAIRS DEPT., SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Methods and Apparatus for Measuring Substrate Edge Thickness During Polishing