Patent Assignment
Reel/Frame 022650/0319
Assignment of Assignor's Interest
Recorded: 2009-05-07
Pages: 5
Assignors
IMAEDA, MINORU
Executed: 2009-04-28
IMANISHI, YUICHIRO
Executed: 2009-04-27
SAITO, TAKAO
Executed: 2009-04-24
Assignee
NGK INSULATORS, LTD.
2-56, SUDA-CHO, MIZUHO-KU, NAGOYA-CITY, AICHI, 467-8530, JAPAN
Covered Property
(1)
Apparatus for Depositing Silicon-Based Thin Film and Method for Depositing Silicon-Based Thin Film