Patent Assignment
Reel/Frame 022651/0592
Assignment of Assignor's Interest
Recorded: 2009-05-07
Pages: 4
Assignors
SAKAI, MASANORI
Executed: 2009-04-21
TAKEBAYASHI, YUJI
Executed: 2009-04-21
KATO, TSUTOMU
Executed: 2009-04-22
SASAKI, SHINYA
Executed: 2009-04-22
YAMAZAKI, HIROHISA
Executed: 2009-04-22
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME,, CHIYODA-KU, TOKYO 101-8980, JAPAN
Covered Property
(1)
Substrate processing apparatus and method for manufacturing semiconductor device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.