Patent Assignment
Reel/Frame 022658/0534
Assignment of Assignor's Interest
Recorded: 2009-05-08
Pages: 5
Assignors
SIX, STEPHAN
Executed: 2009-03-02
LILL, MICHAEL
Executed: 2009-03-05
DUESING, RUEDIGER
Executed: 2009-03-03
GELLRICH, BERNHARD
Executed: 2009-03-06
WIDMANN, MICHAEL
Executed: 2009-03-09
SCHUBERT, ANDREAS
Executed: 2009-04-01
VON PAPEN, TILMANN
Executed: 2009-03-02
IHL, THOMAS
Executed: 2009-03-05
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Optical Arrangement for Immersion Lithography with a Hydrophobic Coating, as Well as Projection Exposure Apparatus Comprising the Same
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.