Patent Assignment
Reel/Frame 022660/0598
Assignment of Assignor's Interest
Recorded: 2009-05-08
Pages: 6
Assignors
CHAN, LANA HIULUI
Executed: 2007-11-27
CHEN, FENG
Executed: 2007-11-27
LEVY, KARL B.
Executed: 2007-11-28
Assignee
NOVELLUS SYSTEMS, INC.
3970 NORTH FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Method for Improving Uniformity and Adhesion of Low Resistivity Tungsten Film