Patent Assignment
Reel/Frame 022664/0899
Assignment of Assignor's Interest
Recorded: 2009-05-11
Pages: 2
Assignors
KANEOKA, NORIYUKI
Executed: 2007-07-23
UMEMURA, KAORU
Executed: 2007-07-23
ISHIGURO, KOJI
Executed: 2007-07-23
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
1-24-14, NISHI SHINBASHI, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Charged Particle Beam System, Sample Processing Method, and Semiconductor Inspection System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.