Patent Assignment
Reel/Frame 022679/0029
Assignment of Assignor's Interest
Recorded: 2009-05-13
Pages: 2
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Apparatus and Methods to Remove Films on Bevel Edge and Backside of Wafer