Assignment of Assignor's Interest

Recorded: 2009-05-13 Pages: 2

Assignor

FREISCHLAD, KLAUS

Executed: 2009-02-28

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Apparatus for Wavefront Detection

Application: 12/032,623 →

Publication: US 2008/0144043

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.