Patent Assignment
Reel/Frame 022683/0214
Assignment of Assignor's Interest
Recorded: 2009-05-14
Pages: 6
Assignors
DE GROOT, PETER
Executed: 2009-05-01
LIESENER, JAN
Executed: 2009-05-01
COLONNA DE LEGA, XAVIER
Executed: 2009-04-27
Assignee
ZYGO CORPORATION
21 LAUREL BROOK ROAD P.O. BOX 448, MIDDLEFIELD, CONNECTICUT, 06455-0448
Covered Property
(1)
Interferometer for Overlay Measurements