Patent Assignment
Reel/Frame 022687/0854
Assignment of Assignor's Interest
Recorded: 2009-05-15
Pages: 4
Assignors
HARADA, YUJI
Executed: 2009-04-21
HATAKEYAMA, JUN
Executed: 2009-04-21
MAEDA, KAZUNORI
Executed: 2009-04-21
HASEGAWA, KOJI
Executed: 2009-04-21
SHINACHI, SATOSHI
Executed: 2009-04-21
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Resist Composition and Patterning Process