Patent Assignment
Reel/Frame 022691/0593
Assignment of Assignor's Interest
Recorded: 2009-05-15
Pages: 2
Assignor
SAITOU, SHUNSUKE
Executed: 2009-05-08
Assignee
NEC ELECTRONICS CORPORATION
1753 SHIMONUMABE, NAKAHARA-KU, KAWASAKI, KANAGAWA, 211-8668, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.