Patent Assignment
Reel/Frame 022701/0061
Assignment of Assignor's Interest
Recorded: 2009-05-19
Pages: 2
Assignor
FISCHER, JUERGEN
Executed: 2006-09-21
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Projection Objective of a Microlithographic Projection Exposure Apparatus
Application:
12/467,879 →
Publication:
US 2009/0225296
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.