Patent Assignment
Reel/Frame 022736/0637
Assignment of Assignor's Interest
Recorded: 2009-05-27
Pages: 2
Assignors
NAKAISO, NAOHARU
Executed: 2009-04-09
MAEDA, KIYOHIKO
Executed: 2009-04-09
YAMADA, MASAYUKI
Executed: 2009-04-09
Assignee
HITACHI KOKUSAI ELECTRIC, INC.
14-1 SOTOKANDA 4-CHOME, CHIYODA-KU,, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.