Patent Assignment
Reel/Frame 022738/0803
Assignment of Assignor's Interest
Recorded: 2009-05-27
Pages: 2
Assignors
MORIYA, ATSUSHI
Executed: 2009-04-09
INOKUCHI, YASUHIRO
Executed: 2009-04-09
KUNII, YASUO
Executed: 2009-04-14
Assignee
HITACHI KOKUSAI ELECTRIC, INC.
14-1 SOTOKANDA 4-CHOME,, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.