Patent Assignment
Reel/Frame 022751/0258
Assignment of Assignor's Interest
Recorded: 2009-05-29
Pages: 4
Assignors
SAKAO, YOSUKE
Executed: 2009-05-11
KAMIUTTANAI, KENSUKE
Executed: 2009-04-24
SHIMIZU, AKITAKA
Executed: 2009-05-01
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Plasma Etchimg Method and Plasma Etching Apparatus