Patent Assignment
Reel/Frame 022760/0043
Assignment of Assignor's Interest
Recorded: 2009-06-01
Pages: 2
Assignor
TANABE, JUNICHI
Executed: 2009-03-25
Assignee
HITACHI KOKUSAI ELECTRIC, INC.
14-1 SOTOKANDA 4-CHOME,, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.