Patent Assignment
Reel/Frame 022766/0786
Assignment of Assignor's Interest
Recorded: 2009-06-02
Pages: 3
Assignors
SELTMANN, ROLF
Executed: 2008-09-12
BUSCH, JENS
Executed: 2008-09-11
SCHULZE, UWE
Executed: 2008-09-11
Assignee
ADVANCED MICRO DEVICES, INC.
5204 EAST BEN WHITE BOULEVARD, AUSTIN, TEXAS, 78741
Covered Property
(1)
Method and System for Reducing Overlay Errors in Semiconductor Volume Production Using a Mixed Tool Scenario