Patent Assignment
Reel/Frame 022774/0486
Assignment of Assignor's Interest
Recorded: 2009-06-03
Pages: 4
Assignors
SAKAI, SATOSHI
Executed: 2009-04-20
TSUMURA, YOICHIRO
Executed: 2009-04-20
IIDA, MASAMI
Executed: 2009-04-20
KAWAZOE, KOHEI
Executed: 2009-04-20
Assignee
MITSUBISHI HEAVY INDUSTRIES, LTD.
16-5, KONAN 2-CHOME, MINATO-KU, TOKYO, 108-8215, JAPAN
Covered Property
(1)
Film Quality Evaluation Method, Apparatus Therefor, and Production System for Thin-Film Device