Patent Assignment
Reel/Frame 022786/0297
Assignment of Assignor's Interest
Recorded: 2009-06-05
Pages: 4
Assignors
WEI, ZIN-CHANG
Executed: 2009-03-30
WU, HSIN-HSIEN
Executed: 2009-03-13
CHANG, CHUN-LIN
Executed: 2009-03-13
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN ROAD 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Rotatable and Tunable Heaters for Semiconductor Furnace