Patent Assignment
Reel/Frame 022786/0557
Assignment of Assignor's Interest
Recorded: 2009-06-05
Pages: 2
Assignor
YASUDA, TADAHIRO
Executed: 2009-05-12
Assignee
HORIBA STEC, CO., LTD.
11-5, HOKODATE-CHO, KAMITOBA, MINAMI-KU, KYOTO-SHI, KYOTO, 601-8116, JAPAN
Covered Property
(1)
Flow Controller, Flow Measuring Device Testing Method, Flow Controller Testing System, and Semiconductor Manufacturing Apparatus