Patent Assignment
Reel/Frame 022786/0725
Assignment of Assignor's Interest
Recorded: 2009-06-05
Pages: 4
Assignors
TSAI, PO-FENG
Executed: 2009-05-19
TSEN, ANDY
Executed: 2009-05-19
SUNG, JIN-NING
Executed: 2009-05-19
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN ROAD 6, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
System and Method for Implementing a Virtual Metrology Advanced Process Control Platform