Patent Assignment
Reel/Frame 022791/0375
Assignment of Assignor's Interest
Recorded: 2009-06-08
Pages: 4
Assignor
MOROOKA, IKUMA
Executed: 2009-05-15
Assignee
NGK INSULATORS, LTD.
2-56, SUDA-CHO, MIZUHO-KU, NAGOYA-CITY, AICHI-PREFECTURE, 467-8530, JAPAN
Covered Property
(1)
Wafer Support Device and Component Used for the Same