Patent Assignment
Reel/Frame 022796/0872
Assignment of Assignor's Interest
Recorded: 2009-06-08
Pages: 3
Assignors
ERNUR, DIDEM
Executed: 2005-08-19
TERZIEVA, VALENTINA
Executed: 2005-08-19
SCHUHMACHER, JORG
Executed: 2005-08-19
Assignee
INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM (IMEC)
75 KAPELDREEF, LEUVEN, 3001, BELGIUM
Covered Property
(1)
Slurry Composition and Method for Chemical Mechanical Polishing of Copper Integrated with Tungsten Based Barrier Metals
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.