Assignment of Assignor's Interest

Recorded: 2009-06-12 Pages: 4

Assignors

ENDRES, MARTIN

Executed: 2009-06-08

OSSMANN, JENS

Executed: 2009-06-05

STUETZLE, RALF

Executed: 2009-06-08

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Illuminating Optical Unit and Projection Exposure Apparatus for Microlithography

Application: 12/473,137 →

Publication: US 2009/0251677

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.