Patent Assignment
Reel/Frame 022829/0181
Assignment of Assignor's Interest
Recorded: 2009-06-16
Pages: 3
Assignors
MORISAWA, TOSHIHIRO
Executed: 2009-04-01
IKUHARA, SHOJI
Executed: 2009-04-06
KAGOSHIMA, AKIRA
Executed: 2009-04-06
SHIRAISHI, DAISUKE
Executed: 2009-04-06
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHINBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Etching Process State Judgment Method and System Therefor
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.