Patent Assignment
Reel/Frame 022842/0588
Assignment of Assignor's Interest
Recorded: 2009-06-18
Pages: 2
Assignors
LIU, HSI-SHUI
Executed: 2009-06-05
WANG, YEH-CHIEH
Executed: 2009-06-05
PAI, JIUN-RONG
Executed: 2009-06-05
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Replaceable Electrostatic Chuck Sidewall Shield
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.