Patent Assignment
Reel/Frame 022862/0205
Assignment of Assignor's Interest
Recorded: 2009-06-23
Pages: 3
Assignors
KUBOTA, YOSHIHIRO
Executed: 2009-05-25
AKIYAMA, SHOJI
Executed: 2009-05-22
SHINDO, TOSHIHIKO
Executed: 2009-05-25
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, 100-0004, JAPAN
Covered Property
(1)
Pellicle and Method for Producing Pellicle