Patent Assignment
Reel/Frame 022862/0691
Assignment of Assignor's Interest
Recorded: 2009-06-23
Pages: 3
Assignee
NUFLARE TECHNOLOGY, INC.
2068-3, OOKA, NUMAZU-SHI, SHIZUOKA, 410-8510, JAPAN
Covered Property
(1)
Lithography Apparatus and Focusing Method for Charged Particle Beam