Patent Assignment
Reel/Frame 022871/0409
Assignment of Assignor's Interest
Recorded: 2009-06-24
Pages: 3
Assignor
TIMBRE TECHNOLOGIES, INC.
Executed: 2009-03-12
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Controlling Critical Dimensions of Structures Formed on a Wafer in Semiconductor Processing
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.