Patent Assignment
Reel/Frame 022882/0989
Assignment of Assignor's Interest
Recorded: 2009-06-26
Pages: 2
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method and an Apparatus for Measuring a Deviation of an Optical Test Surface from a Target Shape
Patent:
8,269,981 →
Application:
12/414,390 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.