Patent Assignment
Reel/Frame 022914/0397
Assignment of Assignor's Interest
Recorded: 2009-07-06
Pages: 4
Assignor
TERASAKI, TADASHI
Executed: 2009-06-18
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO 101-8980, JAPAN
Covered Property
(1)
Manufacturing Method of Semiconductor Device and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.