Patent Assignment
Reel/Frame 022922/0621
Assignment of Assignor's Interest
Recorded: 2009-07-07
Pages: 3
Assignors
KOSHIMIZU, CHISHIO
Executed: 2009-06-24
IWATA, MANABU
Executed: 2009-06-24
MATSUDO, TATSUO
Executed: 2009-06-24
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
In-Chamber Member Temperature Control Method, in-Chamber Member, Substrate Mounting Table and Plasma Processing Apparatus Including Same