Patent Assignment
Reel/Frame 022950/0344
Assignment of Assignor's Interest
Recorded: 2009-07-14
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, 107-6325, JAPAN
Covered Property
(1)
Thermal Processing Apparatus and Thermal Processing Method for Object to Be Processed