Patent Assignment
Reel/Frame 022957/0578
Assignment of Assignor's Interest
Recorded: 2009-07-15
Pages: 4
Assignor
SHINDO, TAKEHIRO
Executed: 2009-06-15
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Position Detection Apparatus, and Method of Adjusting a Position of an Imaging Component of the Same