Patent Assignment
Reel/Frame 022963/0598
Assignment of Assignor's Interest
Recorded: 2009-07-16
Pages: 3
Assignee
CARL ZEISS SMT INC.
ONE CORPORATION WAY, PEABODY, MASSACHUSETTS, 01960
Covered Property
(1)
Multiple Current Charged Particle Methods
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.