Patent Assignment
Reel/Frame 022976/0264
Assignment of Assignor's Interest
Recorded: 2009-07-20
Pages: 4
Assignors
DIRECKS, DANIEL JOZEF MARIA
Executed: 2009-05-19
PHILIPS, DANNY MARIA HUBERTUS
Executed: 2009-05-18
VAN DEN DUNGEN, CLEMENS JOHANNES GERARDUS
Executed: 2009-05-18
SCHEPERS, MAIKEL ADRIANUS CORNELIS
Executed: 2009-05-18
BERKVENS, PAUL PETRUS JOANNES
Executed: 2009-05-18
STEFFENS, KOEN
Executed: 2009-05-18
VAN PUTTEN, ARNOLD JAN
Executed: 2009-05-18
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Fluid Handling Structure, Lithographic Apparatus and Device Manufacturing Method