Patent Assignment
Reel/Frame 022985/0425
Assignment of Assignor's Interest
Recorded: 2009-07-21
Pages: 3
Assignors
BANNA, SAMER
Executed: 2009-07-13
TODOROW, VALENTIN
Executed: 2009-07-13
RAMASWAMY, KARTIK
Executed: 2009-07-13
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Method and Apparatus for Pulsed Plasma Processing Using a Time Resolved Tuning Scheme for Rf Power Delivery