Assignment of Assignor's Interest

Recorded: 2009-07-23 Pages: 2

Assignor

FREIMANN, ROLF

Executed: 2009-07-20

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Projection Exposure Tool for Microlithography with a Measuring Apparatus and Method for Measuring an Irradiation Strength Distribution

Patent: 8,537,332 →

Application: 12/507,694 →

Publication: US 2010/0020302

Related Assignments (2)

Other recorded transfers of the patent in this record — the chain of ownership.