Assignment of Assignor's Interest

Recorded: 2009-07-28 Pages: 2

Assignors

YAMAZAKI, HIROHISA

Executed: 2009-07-22

OKADA, SATOSHI

Executed: 2009-07-22

KATO, TSUTOMU

Executed: 2009-07-22

Assignee

HITACHI KOKUSAI ELECTRIC, INC.

14-1 SOTOKANDA 4-CHOME,, CHIYODA-KU, TOKYO, 1018980, JAPAN

Covered Property (1)

Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device

Patent: 8,741,063 →

Application: 12/510,572 →

Publication: US 2010/0035437

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.