Patent Assignment
Reel/Frame 023026/0116
Assignment of Assignor's Interest
Recorded: 2009-07-30
Pages: 8
Assignors
HADIDI, KAMAL
Executed: 2009-07-27
DORAI, RAJESH
Executed: 2009-07-27
LINDSAY, BERNARD G.
Executed: 2009-06-24
SINGH, VIKRAM
Executed: 2009-07-29
PAPASOULIOTIS, GEORGE D.
Executed: 2009-07-15
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
System and Method for Selectively Controlling Ion Composition of Ion Sources