Assignment of Assignor's Interest

Recorded: 2009-07-30 Pages: 2

Assignor

MAJOR, ANDRAS G.

Executed: 2009-07-21

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Illumination System for Illuminating a Mask in a Microlithographic Projection Exposure Apparatus

Patent: 8,164,046 →

Application: 12/504,591 →

Publication: US 2011/0012010

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.