Patent Assignment
Reel/Frame 023040/0120
Assignment of Assignor's Interest
Recorded: 2009-08-03
Pages: 3
Assignor
YAMAMOTO, TETSUYA
Executed: 2009-03-12
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Exposure Apparatus and a Method of Manufacturing a Device That Conduct Exposure Using a Set Light Source Shape