Patent Assignment
Reel/Frame 023042/0417
Assignment of Assignor's Interest
Recorded: 2009-08-03
Pages: 3
Assignors
TSUJIMOTO, HIROSHI
Executed: 2009-07-23
NAGAIWA, TOSHIFUMI
Executed: 2009-07-23
OTSUKA, YUJI
Executed: 2009-07-23
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Method and Apparatus