Assignment of Assignor's Interest

Recorded: 2009-08-13 Pages: 3

Assignor

FIOLKA, DAMIAN

Executed: 2006-08-24

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Illumination System of a Microlithographic Projection Exposure Apparatus, and Depolarizer

Application: 12/540,107 →

Publication: US 2009/0296066

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.