Patent Assignment
Reel/Frame 023100/0876
Assignment of Assignor's Interest
Recorded: 2009-08-14
Pages: 5
Assignee
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE
75 QUAI D'ORSAY, PARIS, F-75007, FRANCE
Covered Property
(1)
Method of Forming High-K Dielectric Films Based on Novel Titanium, Zirconium, and Hafnium Precursors and Their Use for Semiconductor Manufacturing